C-V extraction: differentiating measured data amplifies its noise024681012510152025C (left)reverse bias (V)capacitance (pF)Measured C-VC (left)0.010.112e165e161e172e1711-point smoothedtrue profiledepletion depth (um)doping N (cm^-3)Extracted doping profileraw derivative11-point smoothedtrue profile1/C^2 (x1e21 F^-2)0204060801001201/C^2 (right)1/C^2 (right)C-V extraction: differentiating measured data amplifies its noise