Reciprocal space map of a strained epitaxial film-0.03-0.02-0.0100.010.020.030.740.750.760.770.780.79Qx (r.l.u.)Qz (r.l.u.)linear norm: only the substrate-0.03-0.02-0.0100.010.020.030.740.750.760.770.780.79Qx (r.l.u.)Qz (r.l.u.)LogNorm: film peak and diffuse scatter2e54e56e58e5counts1001000100001e5countsReciprocal space map of a strained epitaxial film